Hydrogen peroxide (H₂O₂) is indispensable in semiconductor manufacturing. Whether blended into sulfuric-peroxide mixtures (SPM, or “piranha acid”) for wafer cleaning or used in other wet etch and strip processes, it delivers the cleaning power fabs rely on to maintain yield.
But once peroxide leaves the wafer stage, it becomes a problem. Highly reactive and corrosive, it challenges traditional wastewater treatment and creates compliance, safety, and cost risks.
ElectraMet provides a direct, reliable solution to this problem, enabling fabs to abate hydrogen peroxide at the source, recover valuable chemistry, and reduce hauling costs.
Why Peroxide Is a Persistent Challenge
Hydrogen peroxide in fab wastewater can:
- Corrode pipes and infrastructure
- Damage membranes in water-reuse systems
- Create safety hazards during transport and storage
- Exceed discharge permits and compliance limits
Blends like piranha acid make treatment even harder. At concentrations above 2% and pH values near zero, biological and chemical methods fail. Catalase enzymes are inactive, activated carbon disintegrates, and dilution isn’t always practical.
That leaves fabs with limited options, until now.
ElectraMet’s Solution for Peroxide Abatement
ElectraMet systems are engineered specifically to handle high-strength peroxide and aggressive chemistries like SPM. Our technology safely converts hydrogen peroxide into water and oxygen; nothing more, nothing less.
The benefits include:
- Proven reliability in destroying high concentrations of H₂O₂, even in extreme acidic conditions
- On-site treatment that eliminates the need for hauling or offsite disposal
- Acid recovery that allows sulfuric acid to be reused
- Compact, automated systems that integrate easily into fab operations
This approach isn’t theoretical, it’s already proven at some of the world’s leading fabs.
Case in Point: Solving the Piranha Acid Problem
A global semiconductor OEM faced a major roadblock: their new process required piranha acid for wafer cleaning, but they couldn’t ship waste streams containing >2% hydrogen peroxide offsite.
After spending more than $1 million testing chemical-based solutions with no success, they turned to ElectraMet.
Our system:
- Safely abated peroxide on-site
- Recovered and reused sulfuric acid, preventing >100,000 m³ of acid from being purchased and disposed
- Eliminated hauling risks and costs
- Supported ESG and zero-waste initiatives
What had been a compliance barrier became a sustainability and cost-saving opportunity.
Beyond Compliance: Creating Value
Hydrogen peroxide abatement is often treated as a “must-do” compliance task. But ElectraMet solutions create value beyond meeting discharge limits:
- Lower total cost of ownership (TCO): Reducing hauling, disposal, and fresh acid purchases.
- Improved sustainability: Reducing Scope 3 emissions tied to transport and raw chemical supply.
- Circular economy alignment: Turning hazardous waste into reusable resources.
For fabs under pressure to cut costs and hit zero-waste targets, these outcomes go far beyond compliance.
The Future of Wastewater in Semiconductor Manufacturing
As fabs grow more advanced, wastewater treatment must evolve in lockstep. Aggressive oxidants like hydrogen peroxide can’t be left to generic chemical systems or hauling contracts. They require solutions designed for precision, automation, and beneficial reuse.
ElectraMet’s peroxide abatement technology gives fabs the tools to meet today’s toughest wastewater challenges, all while building toward the future of circular, zero-waste manufacturing.
ElectraMet’s Peroxide Abatement Technology Helps
Hydrogen peroxide is a vital tool in semiconductor manufacturing, but it doesn’t have to remain a liability once it enters the waste stream.
With ElectraMet’s proven abatement solutions, fabs can:
- Safely eliminate peroxide risk
- Recover and reuse sulfuric acid
- Reduce hauling costs and liabilities
- Advance toward sustainability and zero-waste goals
The result is a wastewater strategy that turns a costly challenge into a resource recovery opportunity: helping fabs stay compliant, resilient, and future-ready. Reach out to us today if you have any questions or would like to know more.